
Professional training
Société Française du Vide

PLASMAS : PRINCIPLES, CHARACTERISATION AND TECHNOLOGIES
Objectives :
This course aims to train people who study or use plasmas, whether low-pressure, with applications dedicated to surface treatment, deposition, or etching, in a wide variety of fields such as mechanics, optics, decoration, and microelectronics, or whether they are highpressure, with applications in combustion triggering, the depollution of gaseous emissions from industry and transport, or ambient air, the treatment of micro-organisms and living matter (sterilization, decontamination), and medicine (wound treatment, coagulation…).
The course lasts three days, alternating theory and practical work. The first aim of the course is to provide basic knowledge of plasma physics (processes of creation and loss of species within the plasma, characteristic quantities, etc.).
About cold plasmas, the different types of plasmas and plasma reactors, as well as their fields of application, will be reviewed. The course will also focus on high-pressure plasmas and their applications.
Practical work will highlight various techniques for plasma diagnostic, both electrical
(Langmuir probes) and optical (emission spectroscopy), giving access to quantities whose knowledge enables better optimization and control of plasma processes.
On completion of this course, participants will be able to:
● understand the physics of cold plasmas (key parameters, characteristic quantities, etc.)
● recognize the different types of plasmas and plasma reactors,
● master some plasma diagnostics, know when and why to use them, and analyze the results
● be familiar with various applications of low- and high-pressure cold plasmas
Laboratoire de Physique des Gaz et des Plasmas
Bat 210, rue Henri Becquerel
91405 Orsay Cedex
Phone: (33) 01 69 15 72 51
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